Opening of the Laboratory of Electron-Beam Nanolithography



The ceremony of opening of the new cleanrooms took place at the Institute of Physics AS CR, v. v. i. at Prague 6, Cukrovarnicka Street on October 29, 2007. The President of the Academy of Sciences of the CR Prof. Vaclav Paces was present there as well as the representatives both of the Institute and of the Institutions participating in the new laboratory building. The following pictures (courtesy Mrs.R.Louvarova) illustrate the visit of the laboratory, the presented lectures and the meeting to some of the guests.


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 The cleanroom for dry and wet etching - the area of class 10000.  The cleanroom (of the basic class 1000) for lithography comprises 2 laminar zones (class 100). The EBL tool on the right.  The most clean part of the laboratory - the laminar zone for deposition and processing of resists.  View into the lecture hall.  View into the lecture hall.  Presentation of the Project principal investigator.
 Presentation of the laboratory and the EBL_tool parameters.  Special thanks to ..  Discussions of the guests.  Discussions of the guests.  Discussions of the guests.  Discussions of the guests.

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Last updated: Oct 31, 2007

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