Opening of the Laboratory of Electron-Beam Nanolithography
The ceremony of opening of the new cleanrooms took place at the Institute of Physics AS CR, v. v. i. at
Prague 6, Cukrovarnicka Street on October 29, 2007. The President of the Academy of Sciences of the CR
Prof. Vaclav Paces was present there as well as the representatives both of the Institute and of the Institutions
participating in the new laboratory building. The following pictures (courtesy Mrs.R.Louvarova) illustrate
the visit of the laboratory, the presented lectures and the meeting to some of the guests.
The cleanroom (of the basic class 1000) for lithography comprises 2 laminar zones (class 100). The EBL tool installed onto the antivibration platform on the right. Its laminar zone maintains the air-temperature within +/- 0,5°C.
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