Vacuum deposition and etching system
Operations:
Vacuum evaporation, sputtering and sputter-etching
The system :
- evaporation and sputtering unit (right)
- sputtering and sputter-etching unit (left)
- control unit (center)
The sources
(right chamber bottom) :
- 2" magnetron sputtering adaptor (left)
- 4-position electron-gun evaporation unit (front)
- 3 standard evaporation boats (rear)
The substrate holders
(interchangeable, right chamber) :
A) - lower one :
- quartz crystal case (left) ,
- plate for substrate heating (center)
B) - upper one :
- quartz crystal case (left) ,
- plate for substrate heating / cooling (right)
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B) |
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The 3" target carousel
(left chamber) :
F.Horáček
Last updated:
Feb 11, 2005
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The sources
(right chamber bottom) : 
